Influence of a deep-level-defect band formed in a heavily Mg-doped GaN contact layer on the Ni/Au contact to p-GaN |
CTLM I − V measurement at room temperature for samples with different p++-GaN thickness (Sample B: 12 nm, Sample C: 19 nm, Sample D: 21 nm, Sample E: 23 nm, Sample A: 25 nm, Sample F: 27 nm, Sample G: 36 nm) when the spacing of the CTLM pattern is fixed as 30 μm. |