ReaxFF molecular dynamics study on oxidation behavior of 3C-SiC: Polar face effects
Sun Yu†
a)
, Liu Yi-Jun
a),
b)
, Xu Fei
a)
Consumption of O
2
with time during the oxidation at 1000 K, 3000 K, and 5000 K. (a) (100) face. (b) (111) face.