Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment
Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment |
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Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
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| (a) Axial distribution of the electronegativity, (b) the ratio of the peak value of the electron density and the O− ion density, at 300 W, 20 mTorr. |
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