Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment
Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
       
Axial distribution of the (a) electron density; (b) electron temperature; (c) O− ion density; (d) Ar+ ions density for different oxygen contents, at 300 W, 20 mTorr.