Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment
Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
       
Axial distribution of the (a) electron density, (b) electron temperature, (c) O ion density, and (d) Ar+ ion density for different pressures, at 300 W, Ar/O2 = 0.8/0.2.