Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment
Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
       
(a) Axial distribution of the electronegativity, (b) the ratio of the peak value of the electron density and the O ion density, at 20 mTorr, Ar/O2 = 0.8/0.2.