Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment
Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment |
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Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
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| Axial distributions of the (a) electron density, (b) electron temperature, (c) O− ion density, and (d) Ar+ ion density for different powers, at 20 mTorr, Ar/O2 = 0.8/0.2. |
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