Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment
Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment |
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Wang Yan-Hui, Wei Liu, Zhang Yu-Ru, Wang You-Nian†
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| Axial comparisons between the experiment data (dotted line) and simulation results (solid line): (a) electron density; (b) electron temperature, for an Ar/O2 (0.5/0.5) discharge sustained at 300 W, 10 and 80 mTorr. |
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