Design and fabrication of structural color by local surface plasmonic meta-molecules
Ma Ya-Qi
a)
, Shao Jin-Hai
a)
, Zhang Ya-Feng
b)
, Lu Bing-Rui
a)
, Zhang Si-Chao
a)
, Sun Yan
c)
, Qu Xin-Ping
d)
, Chen Yi-Fang†
a)
Variation of measured diameter of hole in PMMA with exposure dose in the EBL process.