Design and fabrication of structural color by local surface plasmonic meta-molecules

Ma Ya-Qi^a), Shao Jin-Hai^a), Zhang Ya-Feng^b), Lu Bing-Rui^a), Zhang Si-Chao^a), Sun Yan^c), Qu Xin-Ping^d), Chen Yi-Fang†^a)

Process flow of Al metamaterial with sub-wavelength hole/ring arrays combined with e-beam lithography and thermal deposition process.