Normally-off metamorphic AlInAs/AlInAs HEMTs on Si substrates grown by MOCVD
Huang Jie†a) 
, Li Ming‡b) , Lau Kei-Mayc)
, Li Ming‡, Lau Kei-May
Normally-off metamorphic AlInAs/AlInAs HEMTs on Si substrates grown by MOCVD |
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Huang Jie†
, Li Ming‡, Lau Kei-May |
| The SIMS measurements of (a) sample a (without CF4 treatment) and (b) sample b (CF4 treatment: 150 W/150 s). |
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