Normally-off metamorphic AlInAs/AlInAs HEMTs on Si substrates grown by MOCVD
Huang Jie†a) 
, Li Ming‡b) , Lau Kei-Mayc)
, Li Ming‡, Lau Kei-May
Normally-off metamorphic AlInAs/AlInAs HEMTs on Si substrates grown by MOCVD |
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Huang Jie†
, Li Ming‡, Lau Kei-May |
| (a) Nominal structure of mHEMT device on Si substrate (LT: low temperature; HT: high temperature. Note that the figure is not drawn to scale). (b) TEM cross-section micrograph of mHEMT buffer structure. |
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