Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C<sub>2</sub>H<sub>2</sub> discharges<xref ref-type="fn" rid="cpb142794fn1">*</xref>

Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C₂H₂ discharges*

Liu Xiang-Mei†, Li Qi-Nan, Li Rui

Spatial variation profiles of the dissociative attachment coefficients ( k _a) (a) and the dissociative ionization coefficients ( k _i) (b) for different pulse modulation frequencies within one pulse period: f _m = 40 kHz, 400 kHz, 2.7 MHz.