Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C<sub>2</sub>H<sub>2</sub> discharges<xref ref-type="fn" rid="cpb142794fn1">*</xref>

Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C₂H₂ discharges*

Liu Xiang-Mei†, Li Qi-Nan, Li Rui

Schematic diagram of the pulsed radio-frequency capacitively coupled plasma reactor.