Effects of N2/O2 flow rate on the surface properties and biocompatibility of nano-structured TiO xN y thin films prepared by high vacuum magnetron sputtering*
Saleem Sehrisha),b), Ahmad R.†a), Ikhlaq Uzmaa), Ayub R.c), Wei Hong Jinb), Rui Zhen Xub), Peng Hui Lib), Abbas Khizraa), Chu Paul K.b)
       
High-resolution XPS spectra of Ti2p obtained from TiO x N y films prepared at different oxygen flow rates: (a) 15 sccm, (b) 10 sccm, and (c) 5 sccm.