High efficiency, large-active-area superconducting nanowire single-photon detectors

Gu Min^a), Zhang La-Bao^a), Kang Lin^a)†, Zhao Qing-Yuan^a), Jia Tao^a), Wan Chao^a), Xu Rui-Ying^a), Yang Xiao-Zhong^a), Wu Pei-Heng^a), Zhang Yong^b), Xia Jin-Song^b)

Three-dimensional (3D) Schematic diagram of fabricating an SNSPD device with a double-side cavity. The NbN nanowire width was 100 nm. The thickness of the SiO₂, SiO_x, and Au mirror layers were 250 nm, 240 nm, and 150 nm.