Modeling the reactive sputter deposition of Ti-doped VO x thin films*
Wang Taoa), Yu Hea)†, Gu De-Ena), Guo Ruia), Dong Xianga), Jiang Ya-Donga), Wu Rui-Linb)
       
Schematic diagram of the conditions at the target and collecting area during reactive sputtering with two reactive gases. The symbols are defined in the text.