Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition*
Sun Penga),b), Hu Minga)†, Zhang Fengb), Ji Yi-Qinb), Liu Hua-Songb), Liu Dan-Danb), Leng Jianb)
       
The FTIR spectra of DLC film and antireflective film-coated Si substrate.