Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition<xref ref-type="fn" rid="cpb150009fn1">*</xref>

Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition*

Sun Peng^a),^b), Hu Ming^a)†, Zhang Feng^b), Ji Yi-Qin^b), Liu Hua-Song^b), Liu Dan-Dan^b), Leng Jian^b)

The FTIR spectra of DLC film and antireflective film-coated Si substrate.