Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition
*
Sun Peng
a),
b)
, Hu Ming
a)†
, Zhang Feng
b)
, Ji Yi-Qin
b)
, Liu Hua-Song
b)
, Liu Dan-Dan
b)
, Leng Jian
b)
The AFM images of the DLC films deposited at different ion-beam voltage: (a) 600 V, (b) 1000 V, and (c) 1200 V.