Thin film micro-scaled cold cathode structures of undoped and Si-doped AlN grown on SiC substrate with low turn-on voltage<xref ref-type="fn" rid="cpb142471fn1">*</xref>

Thin film micro-scaled cold cathode structures of undoped and Si-doped AlN grown on SiC substrate with low turn-on voltage*

Shi Ming^a)†, Chen Ping^a)†, Zhao De-Gang^a)‡, Jiang De-Sheng^a), Zheng Jun^a), Cheng Bu-Wen^a), Zhu Jian-Jun^a), Liu Zong-Shun^a), Liu Wei^a), Li Xiang^a), Zhao Dan-Mei^a), Wang Qi-Ming^a), Liu Jian-Ping^b), Zhang Shu-Ming^b), Yang Hui^b)

Atomic force surface micro-images (5 μm × 5 μm) of (a) undoped AlN and (b) Si-doped AlN films grown on SiC substrate.