Thin film micro-scaled cold cathode structures of undoped and Si-doped AlN grown on SiC substrate with low turn-on voltage*
Shi Minga)†, Chen Pinga)†, Zhao De-Ganga)‡, Jiang De-Shenga), Zheng Juna), Cheng Bu-Wena), Zhu Jian-Juna), Liu Zong-Shuna), Liu Weia), Li Xianga), Zhao Dan-Meia), Wang Qi-Minga), Liu Jian-Pingb), Zhang Shu-Mingb), Yang Huib)
       
Profiles of silicon and aluminum concentrations for the Si-doped AlN sample measured by SIMS.