Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors*
Wang Wen-Boa), Gu Hanga), He Xing-Lia), Xuan Wei-Penga), Chen Jin-Kaia), Wang Xiao-Zhia)†, Luo Ji-Kuia),b)‡
       
(a) Schematic diagram of a ZnO/glass SAW UV sensor device; (b) photo of the wafer; and (c) microscopy photo of IDTs.