Si and Mg pair-doped interlayers for improving performance of AlGaN/GaN heterostructure field effect transistors grown on Si substrate<xref ref-type="fn" rid="cpb142410fn1">*</xref>

Si and Mg pair-doped interlayers for improving performance of AlGaN/GaN heterostructure field effect transistors grown on Si substrate*

Ni Yi-Qiang, He Zhi-Yuan, Yao Yao, Yang Fan, Zhou De-Qiu, Zhou Gui-Lin, Shen Zhen, Zhong Jian, Zheng Yue, Zhang Bai-Jun, Liu Yang†

(a) Schematic of AlGaN/GaN with Si and Mg pair-doped GaN interlayers. (b) SIMS profile of Si and Mg concentrations in sample B₁. Inset is the conduction band diagram for the proposed HFET structure.