General design basis for a final optics assembly to decrease filamentary damage |
Maximum intensification factor ((a1), (b1), and (c1)) and worst filling factor ((a2), (b2), and (c2)) along the propagation axis in the downstream component based on the 50 μm ((a1) and (a2)), 100 μm ((b1) and (b2)), and 300 μm ((c1) and (c2)) front-surface particles of upstream component. |