General design basis for a final optics assembly to decrease filamentary damage<xref ref-type="fn" rid="cpb141847fn1">*</xref>

General design basis for a final optics assembly to decrease filamentary damage*

Sun Xiao-Yan^a),^b), Lu Xing-Qiang^a)†, Lü Feng-Nian^a), Zhang Guo-Wen^a), Zhang Zhen^a), Yin Xian-Hua^a), Fan Dian-Yuan^a)

Effect of front-surface contaminant particles of upstream component on the incident beam characteristics of downstream component. (a) Diagram of optical layout; (b) light field patterns at different positions.