General design basis for a final optics assembly to decrease filamentary damage*
Sun Xiao-Yana),b), Lu Xing-Qianga)†, Lü Feng-Niana), Zhang Guo-Wena), Zhang Zhena), Yin Xian-Huaa), Fan Dian-Yuana)
       
Effect of rear-surface contaminant particles of upstream component on the incident beam characteristics of downstream component. (a) Diagram of optical layout; (b) light field patterns at different positions.