General design basis for a final optics assembly to decrease filamentary damage*
Sun Xiao-Yana),b), Lu Xing-Qianga)†, Lü Feng-Niana), Zhang Guo-Wena), Zhang Zhena), Yin Xian-Huaa), Fan Dian-Yuana)
       
Schematic diagram of a contamination particle on the (a) rear-surface and (b) front-surface of a component.