Tunable coplanar waveguide resonator with nanowires*
Zhou Yu, Jia Tao, Zhai Ji-Quan, Wang Cheng, Zhong Xian-Qian, Cao Zhi-Min, Sun Guo-Zhu†, Kang Lin, Wu Pei-Heng
       
Geometry of a typical half-wavelength CPWR with gap capacitors: (a) top view, (b) cross section view. The center conductor and lateral ground (blue) are on top of a high resistivity silicon substrate (gray).