Room-temperature terahertz detection based on CVD graphene transistor |
(a) Schematic cross section and equivalent circuit of the detector. (b) Raman spectra of the graphene channel before the fabrication. (c) Optical microscopic images of the detector. Insets: the top shows the dotted box before the ALD process of Al2O3; the bottom shows the dotted box after the ALD, the deposition of the top gate and the lift-off. |