Application of an Al-doped zinc oxide subcontact layer on vanadium-compensated 6H–SiC photoconductive switches
*
Zhou Tian-Yu
a),
b)
, Liu Xue-Chao
a)†
, Huang Wei
a)
, Dai Chong-Chong
a),
b)
, Zheng Yan-Qing
a)
, Shi Er-Wei
a)
The x-ray diffraction patterns of AZO thin film deposited on c plane 6H–SiC substrate.