Performance improvement of GaN-based light-emitting diodes transferred from Si (111) substrate onto electroplating Cu submount with embedded wide p-electrodes |
HR-XRD 2 θ / ω scans around GaN (0002) of the LED film on Si before and after etching by ICP-RIE, and the embedded wide p-electrode LED on Cu, respectively. The diffraction peaks of GaN (0002) are shown in the inset. |
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