Energy-band alignment of atomic layer deposited (HfO
2
)
x
(Al
2
O
3
)
1 −
x
gate dielectrics on 4H-SiC
*
Jia Ren-Xu
a)†
, Dong Lin-Peng
a)
, Niu Ying-Xi
b)
, Li Cheng-Zhan
c)
, Song Qing-Wen
a)
, Tang Xiao-Yan
a)
, Yang Fei
b)
, Zhang Yu-Ming
a)
XPS full spectra of (HfO
2
)
x
(Al
2
O
3
)
1 − x
samples.