Modeling and experiments of N-doped vanadium oxide prepared by a reactive sputtering process
Wang Taoa), Yu Hea)†, Dong Xianga), Jiang Ya-Donga), Wu Rui-Linb)
       
V 2p3/2 lines of vanadium oxides film taken at different samples with different oxygen flow. Oxygen flow is (a) 2 sccm, (b) 3.8 sccm, (c) 4.2 sccm, and (d) 6 sccm.