Effect of helium implantation on SiC and graphite<xref ref-type="fn" rid="cpb143006fn1">*</xref>

Effect of helium implantation on SiC and graphite*

Guo Hong-Yan^a),^b)†, Ge Chang-Chun^a),^b)‡, Xia Min^b)†§, Guo Li-Ping^c), Chen Ji-Hong^c), Yan Qing-Zhi^b)

AFM images of bulk SiC before and after He⁺ implantation: (a) before He⁺ implantation, (b) He⁺ implantation at RT, (c) He⁺ implantation at 600°C.