Strain analysis of free-standing strained silicon-on-insulator nanomembrane
*
Sun Gao-Di
a),
b)
, Dong Lin-Xi
a)†
, Xue Zhong-Ying
b)
, Chen Da
b)
, Guo Qing-Lei
b)
, Mu Zhi-Qiang
b)
Optical microscope pictures of (a) the suspended sSi nanomembrane and (b) the sSi nanomembrane sticking to the substrate.