Strain analysis of free-standing strained silicon-on-insulator nanomembrane<xref ref-type="fn" rid="cpb142081fn1">*</xref>

Strain analysis of free-standing strained silicon-on-insulator nanomembrane*

Sun Gao-Di^a),^b), Dong Lin-Xi^a)†, Xue Zhong-Ying^b), Chen Da^b), Guo Qing-Lei^b), Mu Zhi-Qiang^b)

(a) Cross-sectional TEM image of sSOI sample, (b) Raman spectra of strained silicon and bulk Si.