Influence of substrate bias voltage on the microstructure of nc-SiO
x
:H film
*
Li Hui-Min, Yu Wei†
, Xu Yan-Mei, Ji Yun, Jiang Zhao-Yi, Wang Xin-Zhan, Li Xiao-Wei‡
, Fu Guang-Sheng
FTIR absorption spectra of nc-SiO
x
:H films versus bias voltage.