Defect reduction in GaAs/Si film with InAs quantum-dot dislocation filter grown by metalorganic chemical vapor deposition
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Wang Jun†
, Hu Hai-Yang, Deng Can, He Yun-Rui, Wang Qi, Duan Xiao-Feng, Huang Yong-Qing, Ren Xiao-Min
SEM images of etched surfaces of the GaAs/Si samples (a) without and (b) with the QD dislocation filter.