Improved performance of AlGaN/GaN HEMT by N<sub>2</sub>O plasma pre-treatment<xref ref-type="fn" rid="cpb141309fn1">*</xref>

Improved performance of AlGaN/GaN HEMT by N₂O plasma pre-treatment*

Mi Min-Han, Zhang Kai, Zhao Sheng-Lei, Wang Chong, Zhang Jin-Cheng, Ma Xiao-Hua, Hao Yue†

Schematic cross section of N₂O plasma pre-pretreated AlGaN/GaN HEMT.