Transport mechanism of reverse surface leakage current in AlGaN/GaN high-electron mobility transistor with SiN passivation*
Zheng Xue-Fenga),b)†, Fan Shuanga),b), Chen Yong-Hea),b), Kang Dia),b), Zhang Jian-Kuna),b), Wang Chonga),b), Mo Jiang-Huic), Li Liangc), Ma Xiao-Huab), Zhang Jin-Chenga),b), Hao Yuea),b)
       
Plot of ln( σ surf) versus 1/ T 1/3 at temperatures ranging from 298 K to 423 K under the bias voltage V G1 = −10   V in SiN passivated HEMT with 8-nm-thick Al0.65Ga0.35N barrier layer.