Transport mechanism of reverse surface leakage current in AlGaN/GaN high-electron mobility transistor with SiN passivation*
Zheng Xue-Fenga),b)†, Fan Shuanga),b), Chen Yong-Hea),b), Kang Dia),b), Zhang Jian-Kuna),b), Wang Chonga),b), Mo Jiang-Huic), Li Liangc), Ma Xiao-Huab), Zhang Jin-Chenga),b), Hao Yuea),b)
       
Plots of reverse surface leakage current and bulk leakage current versus V G1 at room temperature, which are extracted by utilizing the dual-gate structure in Fig.  1 .