Transport mechanism of reverse surface leakage current in AlGaN/GaN high-electron mobility transistor with SiN passivation<xref ref-type="fn" rid="cpb140887fn1">*</xref>

Transport mechanism of reverse surface leakage current in AlGaN/GaN high-electron mobility transistor with SiN passivation*

Zheng Xue-Feng^a),^b)†, Fan Shuang^a),^b), Chen Yong-He^a),^b), Kang Di^a),^b), Zhang Jian-Kun^a),^b), Wang Chong^a),^b), Mo Jiang-Hui^c), Li Liang^c), Ma Xiao-Hua^b), Zhang Jin-Cheng^a),^b), Hao Yue^a),^b)

Schematic illustration of dual-gate structure and the measurement circuit. During measurement, both G2 and Ohmic contact are grounded, and G1 is reversed-biased. The surface leakage current is collected by G2, and the bulk leakage current is collected by Ohmic contact.