Computer simulation of the bombardment of a copper film on graphene with argon clusters |
(a) Horizontal D xy and (b) vertical D z components of self-diffusion coefficient of Cu film for a series of bombardments by Ar13 clusters at kinetic energy 20 eV and different incident angles: curve a 45°, curve b 60°, and curve c 75° with n being the number of 5-impact cycles. |