Ordered silicon nanorod arrays with controllable geometry and robust hydrophobicity<xref ref-type="fn" rid="cpb141577fn1">*</xref>

Ordered silicon nanorod arrays with controllable geometry and robust hydrophobicity*

Wang Zi-Wen, Cai Jia-Qi, Wu Yi-Zhi, Wang Hui-Jie, Xu Xiao-Liang†

Fig.#cod#x00A0;3. a Large-area, high-quality metal masks. b#cod#x2013;d Three different SiNR arrays with b d 1 #cod#x003D; 0.34#cod#x00A0;#cod#x03BC;m, l 1 #cod#x003D; 0.35#cod#x00A0;#cod#x03BC;m, c d 2 #cod#x003D; 0.34#cod#x00A0;#cod#x03BC;m, l 2 #cod#x003D; 1.68#cod#x00A0;#cod#x03BC;m, d d 3 #cod#x003D; 0.44#cod#x00A0;#cod#x03BC;m, l 3 #cod#x003D; 1.76#cod#x00A0;#cod#x03BC;m. Samples b#cod#x2013;d are labelled as samples S1#cod#x2013;S3 hereafter.