Electrical properties and microstructural characterization of Ni/Ta contacts to n-type 6H

Electrical properties and microstructural characterization of Ni/Ta contacts to n-type 6H–SiC

Zhou Tian-Yu^a),^b), Liu Xue-Chao†^a), Huang Wei^a), Zhuo Shi-Yi^a), Zheng Yan-Qing^a), Shi Er-Wei^a)

Schematic illustrations of the microstructure evolutions of Ni/Ta/6H–SiC annealed at different temperatures. (a) The initial stage at 750 °C, (b) the transition stage at 850 °C–950 °C, (c) the final stage at 1050 °C.