Electrical properties and microstructural characterization of Ni/Ta contacts to n-type 6H

Electrical properties and microstructural characterization of Ni/Ta contacts to n-type 6H–SiC

Zhou Tian-Yu^a),^b), Liu Xue-Chao†^a), Huang Wei^a), Zhuo Shi-Yi^a), Zheng Yan-Qing^a), Shi Er-Wei^a)

Cross-sectional TEM micrographs of samples NT-750, NT-950, and NT-1050. Panels (a), (c), and (e) show the low magnification views of samples NT-750, NT-950, and NT-1050, respectively; panel (b) shows the selected area electron diffraction patterns of the position “*” in panel (a); HRTEM micrograph of the interface region of NT-950 and the surface place marked as “+” in NT-1050 are given respectively in panels (d) and (f).