Interfacial and electrical characteristics of a HfO<sub>2</sub>/n–InAlAs MOS-capacitor with different dielectric thicknesses

Interfacial and electrical characteristics of a HfO₂/n–InAlAs MOS-capacitor with different dielectric thicknesses

Guan He, Lv Hong-Liang, Guo Hui†, Zhang Yi-Men, Zhang Yu-Ming, Wu Li-Fan

Layout of a Ti/Pt/Au metal electrode for the unit capacitor.