Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma
Kakati H.a) , Borah S. M.†b) 
Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma |
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Kakati H.
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| Changes of discharge voltage with nitrogen flow rate for titanium target at discharge current 100 mA and (a) magnetic field 100 Gs and argon flow rate 10 sccm, (b) magnetic field 100 Gs and argon flow rate 15 sccm, (c) magnetic field 100 Gs and argon flow rate 20 sccm, (d) argon flow rate 15 sccm and magnetic field 50 Gs, and (e) argon flow rate 15 sccm and magnetic field 150 Gs. |
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