Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma
Kakati H.a) , Borah S. M.†b) 
Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma |
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Kakati H.
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| Intensity of (a) Al at different nitrogen flow rates, (b) Al at different oxygen flow rates, (c) Ti at different nitrogen flow rates, and (d) Ti at different oxygen flow rates. |
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