Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma
Kakati H.a) , Borah S. M.†b) 
Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma |
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Kakati H.
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| (a) Schematic diagram of the experimental set up. MM: magnetic field coils, B : magnetic field, E: electric field, PS: discharge power supply, ER: end reflectors, QW: quartz window; (b) schematic diagram of the titanium/aluminium target. |
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